Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices".
Micromachines（2023）
摘要
The enhanced piezoelectric properties of aluminum scandium nitride (AlScN or AlScN) were discovered in 2009 by Morito Akiyama's team [...].
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关键词
piezoelectric aluminium scandium nitride,thin films,alscn,microdevices”
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