Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing

Victor Chan, A. Gasasira, R. Pujari,W.-T. Tseng, T. Gordon, R. Southwick, I. Ok,S. Choi, C. Silvestre, H. Utomo, K. Brew, T. Philip,G. W. Burr, N. Saulnier, S. Teehan, I. Ahsan

IEEE Transactions on Semiconductor Manufacturing（2023）

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摘要

We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.

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关键词

phase change memory,heater process variation,pcm

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