Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

Yisbel E. Marin,Arijit Bera,Matteo Cherchi,Timo Aalto

2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)（2022）

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摘要

We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing. (C) 2022 The Author(s)

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关键词

hydrogen annealing,intrinsic quality factor,racetrack resonator,rib waveguides,strip-waveguide-based Euler,thick SOI platform,ultra-high-q racetrack

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