A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

Wei-Hwa Lin, Li Ci Chen, Ming-Han Ho,Hong-Shen Chen, Yu-Lun Hu,Burn Jeng Lin,Pin-Jiun Wu,Jenny Yi-Chun Liu,Yue-Der Chih, Jonathen Chang,Jiaw-Ren Shih, Chrong Jung Lin,Ya-Chin King

2022 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM（2022）

引用 0|浏览4

暂无评分

摘要

A novel on-wafer self-powered wireless sensing module for extreme ultraviolet (EUV) lithographic process is proposed. A surface sensing pad controlled oscillator oscillate at a frequency proportional to the EUV intensity, where its signal is transmitted wirelessly through an on-chip antenna (OCA). Therefore, the self-powered sensor module can provide wireless EUV monitoring across wafer in advanced lithographic chambers.

查看译文

关键词

wireless sensing circuitry,self-powered,on-wafer,in-situ

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要