Channels, Layout and Size Scalability of Implantable CMOS-Based Multielectrode Array Probes

J. F. Ribeiro,G. Angotzi, A. Perna,M. Vincenzi,G. Orban,F. Boi,L. Berdondini

2022 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM（2022）

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摘要

Micro-structured monolithic CMOS devices enable the integration of dense microelectrode arrays and on-chip circuits for low-power implantable brain interfaces with single neuron spatiotemporal resolution. Here, we demonstrate the scalability of SiNAPS CMOS-probe technology with respect to different probe layouts, array sizes and shank dimensions down to microwire size ranges.

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关键词

array sizes,dense microelectrode arrays,different probe layouts,implantable CMOS-based multielectrode array probes,low-power implantable brain interfaces,microstructured monolithic CMOS devices,microwire size ranges,on-chip circuits,SiNAPS CMOS-probe technology,single neuron spatiotemporal resolution

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