Controlling the surface silanol density in capillary columns and planar silicon via the self-limiting, gas-phase deposition of tris(dimethylamino)methylsilane, and quantification of surface silanols after silanization by low energy ion scattering

Behnam Moeini, Joshua W. Pinder,Tahereh G. Avval,Collin Jacobsen,Hidde H. Brongersma,Stanislav Průša,Pavel Bábík,Elena Vaníčková,Morris D. Argyle,Brian R. Strohmeier, Brian Jones,Daniel Shollenberger,David S. Bell,Matthew R. Linford

Journal of chromatography. A（2023）

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摘要

•Planar Si/SiO2 and a silica capillary were silanized with a gas phase silane.•Surface modifications were performed in an atmospheric pressure reactor.•Surfaces were characterized with XPS and spectroscopic ellipsometry.•The capillary was characterized by intermediate surface testing.•The number of silanols was quantified by ALD and LEIS.

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关键词

Capillary column,Fused silica,Silane,Surface silanol,Low energy ion scattering,Tag-and-Count,Dimethylzinc,Atomic layer deposition

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