STEM Study on the Native Amorphous Surface Axides of Tantalum Film for a Superconducting Qubit.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada(2023)

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Journal Article STEM Study on the Native Amorphous Surface Axides of Tantalum Film for a Superconducting Qubit Get access Junsik Mun, Junsik Mun Condensed Matter Physics and Materials Science Department, Brookhaven National Laboratory, Upton, NY, United StatesCenter for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Chenyu Zhou, Chenyu Zhou Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Peter V Sushko, Peter V Sushko Physical Sciences Division, Physical & Computational Sciences Directorate, Pacific Northwest National Laboratory, WA, USA Search for other works by this author on: Oxford Academic Google Scholar Emma Brass, Emma Brass Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Xiaohui Qu, Xiaohui Qu Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Mingzhao Liu, Mingzhao Liu Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Yimei Zhu Yimei Zhu Condensed Matter Physics and Materials Science Department, Brookhaven National Laboratory, Upton, NY, United States Corresponding author: jmun@bnl.gov Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 762–763, https://doi.org/10.1093/micmic/ozad067.376 Published: 22 July 2023
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native amorphous surface axides,tantalum film
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