Quantification of coverage, uniformity and residues for CVD monolayer graphene transfer process based on image analysis

APPLIED SURFACE SCIENCE(2023)

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摘要
•Low-cost and industry-compatible MATLAB-based image analysis is employed to assess macroscopic coverage, uniformity and residues of graphene transferred onto Si/SiO2 and ITO-covered glass substrates from optical microscopy images.•PMMA-, TRT- and PDMS-assisted transfer processes yield coverages exceeding 80 % on a Si/SiO2 target substrate and are quantitatively compared using MATLAB-based image analysis of optical microscopy images of the transferred graphene.•Deeper insight into changes in fundamental properties of graphene induced by the transfer process itself is gained by detailed analysis of Raman spectra of pristine and transferred graphene.•MATLAB-based image analysis evaluation method for graphene transfer processes is validated by comparing the results obtained with it to Raman mapping results, both being in good agreement.
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关键词
CVD, Monolayer graphene, Microscopy images, Image analysis, MATLAB
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