A new back-to-back graded AlGaN barrier for complementary integration technique based on GaN/AlGaN/GaN platform

2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM(2023)

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摘要
A novel composite barrier layer with back-to-back graded AlGaN in a GaN/AlGaN/GaN epitaxial structure for high performance n- and p-channel devices on the same platform is proposed. By adjusting the relative thicknesses of the two graded layers, we obtain a spread in the width and concentration of carriers in the 3D slabs. The best barrier amongst those studied, enhances the on-current (I-ON) by 24.4% in low voltage n-channel devices, 32.2% the p-channel devices whereas the figure of merit of the power device is higher by 3 times, in comparison to the conventional platform.
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关键词
GaN/AlGaN/GaN,back-to-back graded AlGaN,complementary integration,n-channel,p-channel,breakdown voltage
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