Enhanced polarization properties of one-axis-oriented PZT thin films on transparent glass substrates by controlling chemical composition

Ferroelectric lead zirconate titanate Pb(Zr,Ti)O-3 (PZT) films were deposited on ITO/glass substrates by chemical solution deposition (CSD) technique with processing temperature below the grass-transition point. (100)(c)-oriented PZT films were successfully grown on the ITO/glass substrates with the buffer layer of calcium niobate Ca2Nb3O10 nanosheets (ns-CN), together with enhanced crystallinity with increasing PbTiO3 content in PbZrO3-PbTiO3 system, i.e., x in Pb(Zr1-xTix)O-3. Moderate remanent polarization of similar to 30 mu C cm(-2) and relatively high optical transparency of approximately 80% were accomplished for the PZT films on ns-CN/ITO/glass with x = 0.80 even at the crystallization temperature of 500 degrees C, whereas it exhibited only lower piezoelectric constant d(33) of 22 pm V-1. (c) 2023 The Ceramic Society of Japan. All rights reserved.