New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)

Tatsuya Uchida,Konomi Ikita,Akihiro Tanaka,Kenichi Tsutsumi,Nobuyuki Ikeo,Kazushiro Yokouchi,Noboru Taguchi,Shingo Tanaka

2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)（2023）

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摘要

Electron spectroscopy such as Auger electron spectroscopy (AES) and reflection electron energy loss spectroscopy (REELS) has been developed as a useful technique for chemical state and compositional analysis of surface regions with high spatial and depth resolution. In this report, we present a newly developed spectrum imaging method by using electron spectroscopy which visualizes the elemental distributions on the top surface of the materials from SEM imaging.

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关键词

electron spectroscopy,electron image,chemical state analysis,AES,REELS

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