Microsphere-assisted Hybrid Spectroscopic Reflectometry Using Hyperspectral Imaging for Nanospot 3D Semiconductor Metrology

Soonyang Kwon,Jangryul Park, Youngsun Choi,Kwangrak Kim, Jiwoong Kim, Youngjun Lee,Myungjun Lee, Changhun Choi

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We first demonstrate a microsphere-assisted spectroscopic reflectometry technique using hyperspectral imaging geometry, resulting in the extremely small spot measurement with the maximized throughput. The proposed technique is suitable for the measurement of complex semiconductor devices.

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