Study on annealing effect of bipolar transistors at different temperatures after total dose irradiation

Microelectronics Reliability(2023)

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摘要
The article investigates the annealing process of bipolar transistors after total dose irradiation, using the GLPNP transistor as the research object. After total dose irradiation, room temperature and high temperature annealing tests were carried out. Gummel curve, GS curve and SS curve of bipolar transistor are obtained by I/V scanning, gate scanning and sub-threshold scanning. The evolution behavior of radiation-induced oxide trap charges and interface state damage defects during annealing of bipolar transistors at different temperatures was quantitatively analyzed by different microscopic defect characterization methods. Generally speaking, this study is of great significance to better understand the recovery mechanism of electrical properties of bipolar transistors during annealing after total dose irradiation, and can provide reference for the design, application and radiation-hard of transistors.
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关键词
GLPNP transistor, Annealing effect, Total dose irradiation, Microscopic defect, Electrical properties
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