Deposition of a high entropy thin film by aerosol-assisted chemical vapor deposition.

Weichen Xiao,Mark A Buckingham,Yi Li,Kerry Hazeldine, Bing Han,Sarah H Cartmell,Alexander S Eggeman,Alex S Walton,David J Lewis

Chemical communications (Cambridge, England)（2023）

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摘要

Herein we report for the first time the synthesis of a high entropy (CuZnCoInGa)S metal sulfide thin film deposited by AACVD using molecular precursors.

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关键词

thin film,high entropy,vapor,aerosol-assisted

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