Normal-Direction Graded Hemispheres for Ionic Flexible Sensors with a Record-High Linearity in a Wide Working Range

Flexible pressure sensors developed rapidly with increased sensitivity, a fast response time, high stability, and excellent deformability. These progresses have expanded the application of wearable electronics under high-pressure backgrounds while also bringing new challenges. In particular, the nonlinearity and narrow working range lead to a gradually insensitive response, principally because the microstructure deforms inconsistently on the device interfaces in the whole working range. Herein, we report an ionic flexible sensor with a record-high linearity (R-2 = 0.99994) in a wide working range (up to 600 kPa). The linearity response comes from the normal-direction graded hemisphere (GH) microstructure. It is prepared from poly(dimethylsiloxane) (PDMS)/carbon nanotubes (CNTs)/Au into flexible and deformable electrodes, and its geometry is precisely designed from the linear elastic theory and optimized through finite element simulation. The sensor can achieve a high sensitivity of S = 165.5 kPa(-1), a response-relaxation time of <30 ms, and superb consistency, allowing the device to detect vibration signals. Our sensor has been assembled with circuits and capsulation in order to monitor the function state of players in underwater sports in the frequency domain. This work deepens the theory of linearized design of microstructures and provides a strategy to make flexible pressure sensors that have combined the performances of ultrahigh linearity, high sensitivity, and a wide working range.