The NIST silicon lattice comparator upgrade.

The Review of scientific instruments(2023)

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摘要
The NIST silicon lattice comparator has been in service, in various forms, since the 1970s. It is capable of measuring the difference in lattice spacing between specimens of high-quality float-zone silicon to Δd/d ≈ 6 × 10-9. It has recently undergone a thorough update of its control systems and mechanics. These upgrades result in the ability to collect data with improved stability, less settling time of the instrument, and less operator intervention.
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关键词
lattice,silicon
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