Snapshot Mueller spectropolarimeter imager

Microsystems & Nanoengineering(2023)

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摘要
We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture. The division-of-focal-plane concept combines a multiplexed illumination scheme based on Fourier optics together with an integrated telescopic light-field imaging system. Polarization-resolved imaging is achieved using broadband nanostructured plasmonic polarizers as functional pinhole apertures. The recording of polarization and wavelength information on the image sensor is highly interpretable. We also develop a calibration approach based on a customized neural network architecture that can produce calibrated measurements in real-time. As a proof-of-concept demonstration, we use our calibrated system to accurately reconstruct a thin film thickness map from a four-inch wafer. We anticipate that our concept will have utility in metrology, machine vision, computational imaging, and optical computing platforms.
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关键词
Micro-optics,Nanophotonics and plasmonics,Optical sensors,Engineering,general
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