Analysis and Verification of the Temperature Drift Characteristics of MEMS Resonant Sensors During Power-On Startup.

In practical applications, the quick startup of microelectromechanical systems (MEMS) sensors is particularly crucial, and the temperature drift during a power-on startup has become a major concern. In this article, a universal analysis method for temperature variation during the power-on startup of MEMS resonant sensors is proposed. In this research, a 1-D simplified thermal resistance model was established by quantitatively calculating the equivalent thermal power consumption of the complete heat source and the equivalent thermal resistance of different heat transfer methods. The device startup temperature drift characteristics were verified via finite element analysis with the system based on the printed circuit board (PCB) as an example. The experimental results showed that the method correctly predicted the temperature drift and stabilization time after startup with an error of < 10%. The goal of this research was to advance the theoretical study of MEMS sensors during the power-on startup and to provide an accurate temperature field model for future design optimization and error correction.