Practical ring-resonator thermometer with an uncertainty of 10 mK
MEASUREMENT(2023)
摘要
Silicon ring resonators are currently being assessed by several national metrology organizations as thermometers for use in calibration laboratories and in high-accuracy commercial applications. In this paper, we report the improvements to our first prototype of Si ring-resonator thermometer including narrower ring resonances, different light polarization in the ring and smaller-footprint probe housing. We evaluated the second prototype in the stirred liquid bath between 23 °C and 80 °C over the span of 11 months and we present, for the first time, the full uncertainty budget for the packaged ring-resonator thermometer. The combined 10-mK standard uncertainty for our ring-resonator thermometer is not only identical to the repeatability reported previously for an unpackaged ring resonator but it also includes an 11-month long-term stability component. This result heralds a commercial ring-resonator thermometer.
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关键词
Photonic thermometry,Temperature sensor,Silicon ring resonator
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