Multifunctional MSAW Sensor Based on Love Wave with RFID Tags Functionalities

This paper shows the feasibility and the performance of a multifunctional device based on a surface acoustic wave delay line. It combines a magnetic field detection with a temperature sensing and has also a radio frequency identification (RFID) capability. This promising device consists of a Co-Fe-B thin film as a magnetic field sensitive material over a ZnO/LiNbO 3 Y-cut (X-direction) structure, used as a platform for guided Love waves. The experimental results show high sensitivities of -774 ppm/mT and -67.7 ppm/°C for magnetic field and temperature detection, respectively. The device thus allows magnetic field measurements with the possibility of temperature compensation which make it particularly attractive for industrial applications.