Microvibration Control of Hybrid Platform for High-Tech Equipment in Buildings Using Brain Emotional Learning-Based Intelligent Controller

In the semiconductor industry, the vulnerability of high-tech facilities installed on platforms to ground excitations induced by nearby traffic is significantly pronounced, primarily due to their small-scale dimensions. Consequently, it is imperative to design a smart control technique by effectively utilizing model-free controllers. Recently, adaptive intelligent control algorithms have emerged as a viable alternative to conventional model-based control algorithms. To address this issue, this study meticulously designed a hybrid platform using the adaptive intelligent controller known as the brain emotional learning-based intelligent controller, along with a Sugano fuzzy inference system to effectively optimize the controller's learning parameters. These learning and intelligent-based algorithms offer notable advantages, including the ability to handle nonlinearity, uncertainty, and training capabilities within the control systems. To assess the effectiveness of the proposed controller in mitigating vibrations induced by traffic on high-tech facilities, a three degree-of-freedom structure is employed along with the hybrid platform. Finally, the performance of the hybrid platform in terms of microvibration control levels is meticulously validated using the Bolt Beranek Newman vibration criteria. Simulation results unequivocally demonstrate that the proposed controller outperforms both an uncontrolled system and a traditional linear quadratic regulator controller in terms of reducing the traffic-induced response of the hybrid platform and second floor, respectively. Through the integration of learning and intelligent-based controllers, the velocity levels of both the hybrid platform and the second floor are reduced to approximately 49.02% and remain well within the acceptable standard criteria curves.