Densification and grain orientation of ruthenium targets under hot-pressing deformation

Fengshuo Xu,Hao Cui,Manmen Liu,Jialin Chen,Ming Wen,Chuanjun Wang,Wei Wang,Song Li,Xudong Sun,Shaohong Liu

MATERIALS LETTERS（2023）

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摘要

•High-performance Ru targets was successfully prepared by hot-pressing defomation.•The optimal deformation temperature is 1400 °C.•Ru target exhibiting a relative density of 97.4%, a mean grain size of 4.4 μm and a dominant (002) texture.

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关键词

Integrated circuits,Ruthenium targets,Hot-pressing deformation,Preferred orientation,Sintering,Microstructure

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