Prediction of fracture evolution in the TiN/Al thin films based on a full-field modelling approach

Konrad Perzynski,Grzegorz Cios,Lukasz Madej

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES（2023）

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摘要

•new approach to numerical investigation of the fracture evolution in pulsed laser-deposited thin films,•full-field model of layer columnar morphology in pulsed laser-deposited thin films,•identified fracture model parameters based on nanoindentation and inverse analysis.

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关键词

Pulsed laser deposition,Thin films,Nanoindentation,Digital material representation,Inverse analysis,Cohesive zone,Finite element analysis

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