High-throughput and cost-effective method for production of high-quality semi-insulating InP substrates

JOURNAL OF CRYSTAL GROWTH（2023）

引用 0|浏览1

暂无评分

摘要

•Inexpensive technological process for high-yield production of semi-insulating InP wafers.•The obtained semi-insulating wafers have properties that outperform those of standard Fe-doped InP.•The procedure is simple and reproducible, ready for industrial application.

查看译文

关键词

B.1 Indium phosphide,A.1 Substrates,A.2 Growth from the melt,A.2 Czochralski method,B.2 Semiconducting III–V materials,B.2 Semi-insulating properties

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要