Hybrid fabrication of flexible fully printed carbon nanotube field-effect transistors

Hao-wen Zhang, Xiao-han Liao, Yang-sheng Wang, Jian-qiang Luo,Zhao-quan Xu,Yuan-ming Chen,Zhe-sheng Feng,Yan Wang

Journal of Materials Science: Materials in Electronics(2023)

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摘要
facile and cost-efficient multiple fully printed method to fabricate p-type carbon nanotube field-effect transistor (CNTFET) on the flexible paper substrate is proposed in this paper. Through the selective separation of polymer poly[(9,9-dioctylfluorenyl-2,7-diyl)-alt-(benzo [2,1,3] thiadiazol-4,7-diyl)] (PFO-BT) and stable dispersion of sodium dodecylbenzene sulfonate (SDBS) surfactant, the obtained CNTs individually dispersed ink (denoted as mono-dispersion ink) is applied in standard inkjet printers. The multiple system of Roll-to-Roll (R2R) flexo printing (to print silver-based catalyst ink for the subsequent electroless copper plating process) and inkjet printing (to print semiconductor channel material) is adopted in p-type metal-oxide-semiconductor field-effect transistor (MOSFET) fabrication with good printing line accuracy and high-throughput. The transistors obtained by this fabrication process can maintain an on-off ratio ( I on /I off ≈ 2806), with approximately 70
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