SmartNIR - Development of a highly miniaturised NIR-spectrometer for integration into mobile devices

Peter Reinig, Hans-Georg Dallmann, Jens Kruse,Jens Knobbe

MikroSystemTechnik Congress 2021; Congress(2021)

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摘要
The development of SmartNIR, a highly miniaturised NIR-spectrometer for integration into mobile devices as smartphones, tablets or other IOT systems is presented. Key of this highly miniaturized spectrometer is a MEMS-scanning-grating chip. The realised SmartNIR module has total dimensions of (13x12x6) mm3. The SmartNIR module has a free spectral range from 900-1850 nm and a spectral resolution of < 12 nm (FWHM). With a maximum package height of 6 mm the module can be integrated into standard housings of mobile devices, which is promising for future applications.
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