Flexible CMOS electronics based on 2D p-type WSe2 and n-type MoS2

2023 Device Research Conference (DRC)(2023)

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摘要
Flexible electronics have been emerging in the last years for a wide variety of applications. In this scenario, transition metal dichalcogenides (TMDCs), such as molybdenum disulfide (MOS 2 ) and tungsten diselenide (WSe 2 ), have captured increased attention because of their complementary transport properties, and their excellent mechanical flexibility [1]. In particular, MOS 2 has shown good electron transport, while WSe 2 has predominantly shown hole transport [2]. This enables complementary metal-oxide semiconductor (CMOS) technology with its inherent advantages over its unipolar counterpart, i.e., low power dissipation and large noise immunity. Here, we demonstrate n-type MOS 2 and p-type WSe 2 field effect transistors (FETs) and combine them to form CMOS inverters on a flexible polyimide (PI) substrate.
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关键词
CMOS inverters,complementary metal-oxide semiconductor,complementary transport properties,electron transport,flexible CMOS electronics,flexible electronics,flexible polyimide substrate,hole transport,mechanical flexibility,n-type field effect transistors,p-type field effect transistors,transition metal dichalcogenides
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