Piezoelectric MEMS for Frequency Control and Sensing

Yao Zhu,Bhattacharya Shashwat, Wenjia Yang,Li Chen,Ying Zhang,Chen Liu

2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)（2023）

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摘要

This paper reviews key piezoelectric MEMS works for the applications of RF signal processing and sensing. The material, device design, and performance of AlN and Sc-doped AlN piezoelectric MEMS devices are discussed. Different process platforms and their applications in frequency control and sensing applications are also presented. Finally, the trends in piezoelectric MEMS research are summarized and future work is recommended.

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关键词

piezoelectric,MEMS,frequency,sensing,resonators,filters,monolithic

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