Wafer-Scale Fabrication of Linear Variable Filter-based Reconstructive Micro-Spectrometer

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We present a compact reconstructive micro-spectrometer based on a linear variable filter consisting of multi-layer stacks with random thicknesses in the spatial domain. A simple gradient deposition/rotation method enables wafer-scale random filters with an encryption function.

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关键词

compact reconstructive microspectrometer,linear variable filter-based reconstructive microspectrometer,multilayer stacks,wafer-scale fabrication,wafer-scale random filters

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