Permanent Trimming of Large-Scale Photonic Circuits with a Focused Silicon Ion Beam

Akhil Varri,Frank Brückerhoff-Plückelmann,Shabnam Taheriniya, Daniel Bernhardt,Torsten Richter,Gerhard Wilde,Wolfram H. Pernice

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We present a novel approach for scalable, permanent trimming of silicon nitride ring resonators with Si ion implantation. Using this approach, we tune ring resonators in a low-loss photonic crossbar array for matrix-vector multiplications.

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