Barium Titanate Electro-Optic Modulators for Silicon Photonics Grown by Off-Axis Sputtering

Agham Posadas,Marc Reynaud,Goran Mashanovich,Alexander A. Demkov

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

Barium titanate thin films with have been epitaxially integrated on silicon-on-insulator wafers. They exhibit excellent structural quality with effective Pockels coefficient >180 pm/V and intrinsic propagation loss <2 dB/cm. Hybrid waveguide modulators based on this material exhibit Vπ-length of 0.42 V-cm.

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关键词

barium titanate electro-optic modulators,barium titanate thin films,excellent structural quality,hybrid waveguide modulators,intrinsic propagation loss,material exhibit Vπ-length,silicon photonics grown,silicon-on-insulator wafers,voltage 0.42 V

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