Low Stress Bilayer LPCVD-PECVD SiN Waveguides for Kerr Frequency Comb Generation

Karl J. McNulty,Xingchen Ji,Andres Gil-Molina,Mateus Corato-Zanarella,Gaurang R. Bhatt,Ipshita Datta, Shriddha Chaitanya,Yoshitomo Okawachi,Alexander L. Gaeta,Michal Lipson

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We demonstrate a foundry-compatible platform based on bilayer LPCVD-PECVD SiN waveguides. Using microrings fabricated from our bilayer waveguide, we show a Kerr soliton frequency comb spanning 300 nm with 125 mW of pump power.

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lpcvd-pecvd

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