Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks

Vladimir A. Volodin,Yuzhu Cheng,Alexander V. Bulgakov,Yoann Levy, Jiří Beránek,Siva S. Nagisetty,Martin Zukerstein,Alexander A. Popov,Nadezhda M. Bulgakova

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

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关键词

(140.3390) Laser materials processing,(320.7120) Ultrafast phenomena

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