High Performance Polarization Rotator-Splitter Based on Si3 N4 Waveguide with Relaxed Fabrication Tolerance
2022 European Conference on Optical Communication (ECOC)(2022)
摘要
A novel polarization rotator-splitter is presented based on Si
3
N
4
platform with relaxed fabrication-tolerance and high-performance. The proposed device is fabricated by standard-photolithography due to the introduced high-asymmetrical directional-coupler, and demonstrates a polarization extinction-ratio ~20dB with the fabrication-tolerance ~±1 50nm and polarization conversion-loss ~1.5dB across the C-band.
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关键词
C-band,high performance polarization rotator-splitter,high-asymmetrical directional-coupler,polarization conversion-loss,polarization extinction-ratio,relaxed fabrication tolerance,Si3N4 waveguide,Si3N4/int,standard-photolithography
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