Quantitative gas pressure measurement by molecular spectroscopy using chip-based supercontinuum in the mid-infrared

We demonstrate the quantitative pressure measurement of gas molecules in the mid infrared using chip-based supercontinuum and cepstrum analysis without additional measurements for baseline normalization. A supercontinuum generated in an on-chip waveguide made of chalcogenide glass having high nonlinearity passes through CO gas and provides a transmission spectrum. The gas absorption information is deconvoluted from the original supercontinuum spectral information containing temporal fluctuation by cepstrum analysis and extracted simply by applying a bandpass filter in the temporal domain. The gas pressure estimated from the extracted absorption information is consistent with the value measured by a pressure gauge within a difference of 1.25%, despite spectral fluctuations in the supercontinuum baseline comparable to the spectral depth of the gas absorption lines. (c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement