2 O/n-ZnO thin film heterojunction was fabricated onto ITO glass"/>

Preparation and Photoelectric Properties of p-Cu2O/n-ZnO Thin Film Heterojunction

2019 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC)(2019)

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摘要
P-Cu 2 O/n-ZnO thin film heterojunction was fabricated onto ITO glass substrate by radio frequency magnetron sputtering. Meanwhile, the characteristics of pCu 2 O/n-ZnO thin film heterojunction were studied systematically. The results show that ZnO thin films have the c-axis preferred orientation, and Cu 2 O thin films have the preferred orientation along the (110). The optical band gap energies of ZnO and Cu 2 O thin films are 3.3 eV and 2.8 eV, respectively. The carrier concentrations of Cu2O and ZnO thin films are 6.41×10 15 cm -3 and 1.4×10 18 cm -3 , the values of resistivity are 6.41 Ω.cm and 1.4 Ω.cm, respectively. Furthermore, the results demonstrated that the absorption intensity of the Cu 2 O/ZnO thin film heterojunction is significantly enhanced in visible region compared with the ZnO thin films. The forward current of the heterojunction increases obviously under illumination.
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关键词
RF magnetron sputtering,ZnO thin films,Cu₂O thin films,thin film heterojunction
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