3D Integrated Photonics Platform with Deterministic Geometry Control
2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)(2021)
摘要
3D integrated photonics has recently emerged in an effort to provide optical systems with the same deployment flexibility as the widely successful flexible and 3D electronics. However, current fabrication methods limit the range of available materials options or device geometries, e.g. to curvilinear geometries that are inherently 2D in topology [1] .
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关键词
delamination,fiber-packaged 3D sensor array,18-channel fiber array,bonding,buckled strips,SU-8,polymer cladding structure,chalcogenide glass,optical components,waveguides,rigid handler substrate,photonic device,deformation,deterministic device placement,3D integrated photonics,deterministic geometry control,Ge23Sb7S70
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