Design and Characterization of Resonant Pressure Microsensor Based on Parametric Pump

For the first time, a resonant pressure microsensor based on parametric pump is presented in this paper. An additional parametric pump signal is applied to the double-clamped beam on a pressure sensitive diaphragm, coupling the first and the second mode of the resonant beam. Through this coupling, characteristics can be transferred between the two fundamental modes. With pressure disturbance, the coupling and distribution of energy between modes will be tuned, leading to mode localization in a single resonator. It is demonstrated that the sensitivity of frequency shifts of the pressure sensor can be modulated from 173.504 Hz/kPa (the sensitivity of the first mode) to 202.859 Hz/kPa (the sensitivity of the second mode), and the sensitivity of amplitude ratio is over 1000 times higher than that of frequency shifts. Besides, the veering point of mode localization and coupling strength can be modulated by changing the frequency and amplitude of parametric pump, which makes it possible to adjust the linear working range and the sensitivity of amplitude ratio of the pressure microsensor.