Gas Mixture Estimation Using Power-Law Models of Arrayed Chemiresistive Metal-Oxide Sensors

This paper presents a model for the resistance of micromachined semiconducting metal-oxide (SMOx) sensors exposed to ternary gas mixtures. This paper also presents a corresponding method for estimating gas concentrations using the measured resistances of an array of on a chip. To our knowledge, this approach has not been reported for multi-gas estimation.