A Self-Decoupled and High-Resolution 2D Displacement Sensor Based on Triboelectric Nanogenerator for Manipulator Precision Positioning

2D displacement sensor (2DDS) is significant in precision manufacturing positioning, machine condition monitoring, robotic manipulation, and human-computer interaction system. However, the reported 2DDSs have severe limitations, such as low accuracy, poor decoupling, and lack of smart signal analysis. Herein, a self-decoupled and high-resolution 2DDS based on two freestanding triboelectric nanogenerators (F-TENGs) is presented. This sensor achieves self-decoupling by two orthogonal and independent 1D displacement sensors with low-cost grating-structured PCB. The test results of the sensor exhibit a high accuracy >= 99.06% (1D) and 98.94% (2D). Also, the experimental and simulation results demonstrate that this sensor has a high resolution of 200 mu m and the function of initial position identification. A 2D displacement sensing system is developed that is capable of collecting F-TENGs' open-circuit voltages in real-time and performing 2D trajectory synthesis and display. This work expands the potential application of the TENG-based 2DDS in robotic precision machining. A self-decoupled and high-resolution 2D displacement sensor based on orthogonally arranged grating-structured freestanding triboelectric nanogenerators is proposed. It can capture 1D displacements along orthogonal directions and synthesis 2D trajectory, which exhibits a high accuracy of >= 99.06% (1D), 98.94% (2D), and a high resolution of 200 mu m. The precision positioning capability shows the potential application in robotic precision machining.image