Frequency Reprogrammable Al_0.7Sc_0.3N Acoustic Delay Line with up to 13.5 % Bandwidth

SummaryIn this study, a 30% Scandium doped Aluminum Nitride (Al0.7Sc0.3N) Two-Dimensional-Resonant-Rods (2DRRs) based Acoustic Delay Line (ADL) is presented. The reported ADL has two distinctive features. Firstly, it shows a record-high bandwidth (BW) up to 13.5 %, which can hardly be achieved by any Lamb Wave or Surface Acoustic Wave counterparts. Secondly, when selecting proper electrical matching conditions and thanks to the unique dispersion features of its metamaterial structure, the reported ADL can be programmed to selectively operate with large BWs around 4 different frequencies (115 MHz, 150 MHz, 210 MHz, and 300 MHz), demonstrating an extraordinary frequency re-programmability that has never been allowed by any prior ADL counterparts.