A Resonant Graphene NEMS Vibrometer (Small 28/2022)

Daniel Moreno Garcia,Xuge Fan,Anderson David Smith,Max C. Lemme, Vincenzo Messina, Cristina Martin‐Olmos,Frank Niklaus,Luis Guillermo Villanueva

Small(2022)

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摘要
Vibration Measurement In article number 2201816, Frank Niklaus, Luis Guillermo Villanueva, and co-workers propose a nano-electromechanical (NEMS) resonant vibration sensor based on double-layer graphene membranes. These sensors have a very small footprint but still, boast responsivities up to six orders of magnitude larger than expected based on the inertial model. The excellent responsivities are due to the bending effect of the chip, which can have important implications for related experimental work.
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resonant graphene nems vibrometer
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