���共晶溶媒から作製した軟磁性膜の磁気特性や結晶組織に与える浴添加剤の影響

Deep eutectic solvents (DESs), a kind of ionic liquids, are expected as a novel solvent for electroplating due to their unique properties such as low vapor pressure, non-combustibility, high thermal stability, and high conductivity. We have employed DES as a solvent to obtain soft magnetic Fe-Ni films and have reported that glycine is an effective bath additive to reduce the coercivity in Fe-rich Fe-Ni films. In the present study, we employed boric acid as an additive in the plating bath and investigated the effect of boric acid on the magnetic and structural properties of Fe-Ni films. The addition of the boric acid reduced the coercivity of the Fe-Ni films. In particular, the boric acid dramatically reduced the coercivity in Fe-poor films, and this behavior was quite different from that for the glycine. From the result of the TEM observation, we confirmed that the Fe-Ni films with low coercivity had a fine crystal structure, which suggested that the fine structure supported improving the soft magnetic properties.