P‐12.8: A Vertical Alignment Technology of Proessing ZnO Sputtered with Ozone Applied on Liquid Crystal on Silicon Display Devices

The vertical alignment technology by processing sputtered ZnO film for LCD with ozone is proposed in this paper. The prepared ZnO thin films were treated with ozone in the ultraviolet cleaning machine through polarizer. The wettability of the treated ZnO films switched to hydrophobicity, reaching a contact angle of 92°. With the prepared ZnO film as the alignment layer in the transmissive LCD cell, the vertical alignment (VA) can be realized. The results demonstrated that the test cells not only possessed the photo‐electronic characteristics of traditional VA liquid crystal cells but also had a smaller threshold voltage of 1.95V. In addition, the ZnO films are applied into character display successfully since the VA test cell has a high contrast ratio.