Silicon

Sunipa Roy, Chandan Kumar Ghosh,Sayan Dey, Abhijit Kumar Pal

BENTHAM SCIENCE PUBLISHERS eBooks(2023)

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摘要
This chapter introduces silicon as an electronic material for microelectronic device fabrication. It discusses, in-depth, the various aspects of crystalline silicon, wafer manufacturing and their identification techniques. Finally, the various steps involved in a microfabrication process are also discussed. From this chapter, the readers are expected to learn how to process a silicon wafer successfully and proceed with customized device fabrication.
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silicon
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