Silicon
BENTHAM SCIENCE PUBLISHERS eBooks(2023)
摘要
This chapter introduces silicon as an electronic material for microelectronic device fabrication. It discusses, in-depth, the various aspects of crystalline silicon, wafer manufacturing and their identification techniques. Finally, the various steps involved in a microfabrication process are also discussed. From this chapter, the readers are expected to learn how to process a silicon wafer successfully and proceed with customized device fabrication.
更多查看译文
关键词
silicon
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要