Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Yingying Li,Elliott Worsey,Simon J. Bleiker,Pierre Edinger,Mukesh Kulsreshath,Qi Tang,Alain Yuji Takabayashi,Niels Quack,Peter Verheyen,Wim Bogaerts,Kristinn B. Gylfason,Dinesh Pamunuwa,Frank Niklaus

Nanoscale（2023）

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摘要

Correction for 'Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process' by Yingying Li et al., Nanoscale, 2023, https://doi.org/10.1039/d3nr03429a.

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