Control strategy of a piezoelectric stage based on the parameter-dependent Bouc-Wen model under condition variations

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY(2024)

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摘要
This paper proposed a feedforward-feedback (FF-FB) control strategy for a linear piezoelectric walking stage (LPWS) based on the parameter-dependent Bouc-Wen (PD-BW) model under condition variations. The mathematical model of LPWS is established by linearization, which consists of a linear system and a hysteresis nonlinearity system. The linear dynamics model of LPWS is identified by the swept-sine method, whereas the hysteresis nonlinearity model of LPWS is identified based on the PD-BW model. The feedforward controller based on the inverse PD-BW model can compensate for the inherent hysteresis nonlinearity of LPWS at varying excitation frequency, surrounding temperature, and external load. A proportional plus lead-lag feedback controller is built to reduce feedforward modelling error and improve the output accuracy of LPWS. The sensitivity analysis of the LPWS feedback control system is performed to reduce the effect of disturbance and noise. Experimental results present the feasibility and effectiveness of the proposed FF-FB control strategy to achieve an efficient and accurate positioning performance.
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关键词
Piezoelectric actuator,Hysteresis,Bouc-Wen model,Parameter variation,Feedforward-feedback control,High -precision positioning
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