A Multiscale-Multiphysics simulation platform for technology virtualization: from process chamber modeling to device electrical prediction

Acceleration is mandatory at both unit and process integration levels to save cost and reduce time to market. In this scenario, modeling and simulation can offer unprecedented opportunity to virtualize process-material-device space and accelerate PPACt, reducing the time to market and costs. In this paper, we will present a novel multiscale and multiphysics simulation platform for technology development virtualization, which connects process chamber modeling to electrical device prediction.