Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

Sami A. Nazib, Mark V. Reymatias,Troy A. Hutchins-Delgado,Shruti I. Gharde, Erika M. Sommer,Erum Jamil,Gennady A. Smolyakov,Tzu-Ming Lu,Sergei A. Ivanov,Ivan Komissarov,Roman Sobolewski,Marek Osiński

2023 IEEE Nanotechnology Materials and Devices Conference (NMDC)（2023）

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摘要

Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.

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关键词

NbTiN,physical vapor deposition,native oxide,X-ray photoelectron spectroscopy,X-ray reflection,X-ray fluorescence,X-ray diffraction,atomic force microscopy

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