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Analysis of static electricity-induced luminescent based on HLAC features

2023 62ND ANNUAL CONFERENCE OF THE SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS, SICE(2023)

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摘要
Static electricity consumption is a major cause of fatal errors in manufacturing. However, there is no established method for quantitatively evaluating invisible static electricity, which makes error detection difficult. Therefore, in this study, the luminescent of static electricity-emitting materials developed by the National Institute of Advanced Industrial Science and Technology (AIST) was imaged while varying the applied voltage, and the relationship between "applied voltage" and "spatial changes (primarily shape)" was investigated using HLAC and principal component analysis (PCA). It was confirmed that the extracted higher-order local autocorrelation (HLAC) can be compressed from 35 to 12 dimensions, and more than 90% of the information is included in PCA1 and PCA2. The analysis results revealed that PCA1 may extract a "wide range of high-intensity luminescent" and PCA2 may extract "spatial changes." Moreover, they confirmed that this information depends on the applied voltage. Therefore, a method for extracting features that can be a part of quantitative evaluation was proposed.
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关键词
HLAC,image proccessing,luminescent,static electricity
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